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A blade of a specific breadth is inserted between the bonded wafer pair. This leads to a split-up of the bond link.
The crack length “L” equals the distance between the blade tip and the crack tip and is determined using IR transmitted light.
The IR light is able to illuminate the crack, when by means of materials transparent to IR or visible light.
Is the fracture surface toughness very elevated, it is very hard to insert the blade and the wafers are endangered to break at the slide in of the blade?
DOUBLE
CANTILEVER BEAM
Double
cantilever beam test, also referred to as crack cavity or razor blade method,
is a technique to define the strength of the bond. This is achieved by conclude
the energy of the bonded surfaces.
A blade of a specific breadth is inserted between the bonded wafer pair. This leads to a split-up of the bond link.
The crack length “L” equals the distance between the blade tip and the crack tip and is determined using IR transmitted light.
The IR light is able to illuminate the crack, when by means of materials transparent to IR or visible light.
Is the fracture surface toughness very elevated, it is very hard to insert the blade and the wafers are endangered to break at the slide in of the blade?
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